DKAT designs, produces and assembles various types of wafer holders for the semiconductor industry. The wafer holders are made on behalf of our client according to the desired specifications.
These wafer holders are made of, among other things, stainless steel, aluminium, titanium, phosphor bronze, Vespel and molybdenum.
The wafer holders are assembled in the cleanroom (class 5) and aligned with an accuracy of up to 0.002 mm. These wafer holders are used under vacuum conditions and are therefore packaged vacuum and cleanroom clean.
DKAT designs, produces and assembles laser height meters for a client from the semiconductor industry. The position of the wafer can be accurately determined with these height meters.
The laser height meters include, in addition to a laser diode and detector, a number of light guides for the detection of photons.